IEC ISO IEC/TS62622 Edition 1.02012-10 TECHNICAL SPECIFICATION Nanotechnologies -Description, measurement and dimensional quality parameters of artificial gratings IEC/TS 62622:2012(E) THIS PUBLICATION IS COPYRIGHTPROTECTED Copyright@2012IEC,Geneva,Switzerland or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or your local IEC member National Committee for further information. IEC Central Office Tel.: +41 22 919 02 11 3, rue de Varembe Fax: +41 22 919 03 00 CH-1211Geneva 20 [email protected] Switzerland www.iec.ch About the IEC International Standards for all electrical, electronic and related technologies. AboutIECpublications The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the latest edition,a corrigenda or an amendment might have been published. Useful links: IEC publications search-www.iec.ch/searchpub Electropedia -www.electropedia.org The advanced search enables you to find IEC publications The world's leading online dictionary of electronic and by a variety of criteria (reference number, text, technical electrical terms containing more than 30 000 terms and committee...). definitions in English and French, with equivalent terms in It also gives informationon projects, replaced and additional languages. Also known as the International withdrawn publications. Electrotechnical Vocabulary (IEV) on-line IEC Just Published - webstore.iec.ch/justpublished Customer Service Centre - webstore.iec.ch/csc Stay up to date on all new IEC publications.Just Published If you wish to give us your feedback on this publication details all new publications released. Available on-line and orneed_further_assistance,. please contactthe also once a month by email. Customer Service Centre: [email protected]. IEC ISO IEC/TS 62622 Edition 1.0 2012-10 TECHNICAL SPECIFICATION Nanotechnologies -Description, measurement and dimensional quality parameters of artificial gratings INTERNATIONAL ELECTROTECHNICAL COMMISSION W PRICE CODE ICS 07.030 ISBN 978-2-83220-394-1 Warning! Make sure that you obtained this publication from an authorized distributor.